TRAP STRUCTURE FOR EXHAUST GAS LINE

摘要

PURPOSE: A horizontal trap structure for exhaust gas from chemical vapour deposition or etching process of semiconductor is provided. CONSTITUTION: The horizontal trap structure for exhaust gas comprises a trap body(140) which vertically connects a pump exhaust pipe(130a) and a washer exhaust pipe(130b); a coolant circulation pipe(143) which is spirally installed along the outer circumference of the trap body; a filter support(142) in which a filter for removing pollutants from exhaust gas stream being introduced via the pump exhaust pipe; and a means which enables attachment and detachment of the filter support off the trap body.