发明名称 RINSING SOLUTION PREPARING DEVICE
摘要 PURPOSE: A device for preparing a rinsing solution is provided to simplify the crude liquid supplying lines by supplying crude liquids simultaneously by using timers and a stop valves and realize more precise concentration of the rinsing solution. CONSTITUTION: A device for preparing a rinsing solution includes a plurality of crude liquid supplying parts(111-113) for supplying crude liquids of respective components, a crude liquid mixing part having a stop valve(224) and an auto balancing valve(222) for simultaneously controlling flow rates of the crude liquids supplied from the crude liquid supplying parts and a control unit(240) for simultaneously extracting predetermined amounts of the crude liquids, and a mixing container part(300) for receiving and mixing the crude liquids extracted by the crude liquid mixing part to form a composition solution of a predetermined concentration.
申请公布号 KR20020092087(A) 申请公布日期 2002.12.11
申请号 KR20010030972 申请日期 2001.06.02
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KANG, HO MIN;LEE, SU WON;LIM, DAE HYEON
分类号 G02F1/13 主分类号 G02F1/13
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