Improved slurry delivery system for a metal polisher

摘要

A slurry delivery system for use with a polishing machine wherein the slurry delivery system is designed to reduce the incidence of oxidized metals or rust from flowing into a slurry compound used to polish substrates used in the manufacture of disk drives. The slurry delivery system comprises an extended drive shaft made from type 416 stainless steel having a longitudinally extending inner channel Inside of this inner channel is a type 316 slurry feed tube that is used to shield the type 416 stainless steel from a slurry containing corrosive de-ionized water. The drive shaft has a first end connected to a drive motor and a second distal end. Connected to the second distal end is a type 316 stainless steel hub. The hub is surrounded by a urethane slurry distribution plate that has channels cut for allowing slurry to flow. This slurry flows onto a urethane slurry isolation pad and through slurry distribution tubes mounted in holes in the platen and onto the surface of nickel plated substrates used to manufacture hard disk drives.