NEGATIVE TYPE ENERGY BEAM SENSITIVE PASTE, AND PATTERN FORMING METHOD USING THE SAME

摘要

PURPOSE: To provide a negative type energy beam sensitive paste. CONSTITUTION: The negative type energy beam sensitive paste is obtained by incorporating conductive powder and inorganic powder which is fused with heat at need in a negative type energy beam sensitive compound. After the negative type energy beam sensitive paste is laminated on the surface of a base material, the surface of a paste film layer formed of the negative type energy beam sensitive paste is so irradiated with an active energy beam and heat rays through a mask or directly as to obtain a desired pattern, and then the paste film layer is so removed by a developing process as to obtain a desired pattern.