发明名称 Rotating device for plasma immersion supported treatment of substrates
摘要 A rotary drive which is suitable in treatment of three-dimensional workpieces. In this rotary apparatus, only the removably mounted rotatable rods that serve as sample holders are connected to high voltage, which is delivered via a central high-voltage lead-in at the lower end of the rods, while the actual drive elements for rotating the rods are electrically insulated therefrom by suitable ceramic insulating elements.
申请公布号 US6490993(B2) 申请公布日期 2002.12.10
申请号 US19990341763 申请日期 1999.09.09
申请人 ROBERT BOSCH GMBH 发明人 NEIDHARDT RONALD;FORGET JEANNE;KOHLHOF KARL;SCHOSER SIEGMAR
分类号 C23C14/48;C23C14/50;C23C16/458;(IPC1-7):C23C16/509 主分类号 C23C14/48
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