METHOD AND DEVICE FOR REAL-TIME INSPECTION OF FILM COATINGS AND SURFACES

摘要

FIELD: nondestructive inspection of objects. SUBSTANCE: device has X-ray source and recording system both connected to process system. Device is designed for irradiating part under inspection with waves of different lengths simultaneously and its recording system functions to simultaneously and independently record two or more wavelengths. Method involves irradiation of part being inspected with X-ray stream of two wavelengths at the same time recording reflected X-radiation at these wavelengths. In the process film coating is checked for changes in its thickness. Film density and roughness are calculated by adjusting points on theoretical curves to those on experimental curves. EFFECT: provision for in-process acquisition of unbiased data on film coating surface topography and growing layer density. 6 cl, 4 dwg, 1 ex