| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate washing apparatus capable of forming dry steam of high purity by simple constitution to spray hot water mist onto a substrate capable of obtaining high washing effect. SOLUTION: A pure water spray 60 blows pure water into a steam generation pipe 40 in a mist form. The blown mist-like pure water is heated in the steam generation pipe 40 and evaporated to form steam which is, in turn, reheated in a steam heating pipe 50 to form dry steam. This formed dry steam is involved in nitrogen gas blown in from a nitrogen gas nozzle 53 to flow in a hot water mist jet port 52 as mixed gas to form hot water mist. By incorporating a dry steam forming part 30 comprising two-stage constitution of the steam generation pipe 40 and the steam heating pipe 50 into the substrate washing apparatus, dry steam of high purity can be formed by small-sized and simple constitution and, as a result, hot water mist reduced in impurities and capable of obtaining high washing effect can be sprayed onto the substrate.
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