发明名称 Upper cover plate for an air-tight chamber and a tool for removing the same
摘要 An upper cover plate for an air-tight chamber and a tool for removing the upper cover plate from the chamber are introduced. The upper cover plate integrates a chamber body to form the air-tight chamber, in which the chamber body further includes a top surface for air-tightly matching with a bottom surface of the upper cover plate. The upper cover plate further includes a plurality of thread holes engageable respectively with a plurality of the tools. The present invention is characterized on that at least one of the thread holes is formed as a through thread hole connecting to the bottom surface, and that the respective tool for engaging with the through thread hole includes a portion for penetrating the through thread hole and going beyond the bottom surface. By providing the present invention, the top surface of the chamber body can be utilized as a pivotal plane for the tool to easily perform a helical lifting application upon the upper cover plate through the engaged threads, so that the air-tight state of the chamber can be easily removed.
申请公布号 US6491178(B1) 申请公布日期 2002.12.10
申请号 US20000711926 申请日期 2000.11.15
申请人 MOSEL VITELIC INC. 发明人 LIU PHILIP;LEE TONY;LEE WENTCHEN;CHENG ANDREW
分类号 H01L21/00;(IPC1-7):B65D43/26 主分类号 H01L21/00
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