| 发明名称 |
Wafer handling apparatus and method |
| 摘要 |
An insert arm holding and transporting wafers within a wafer jar is disclosed. The insert has a generally round bottom with a plurality of upward extending arms to closely hold and receive wafers which may be loaded either manually or mechanically.
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| 申请公布号 |
US6491732(B1) |
申请公布日期 |
2002.12.10 |
| 申请号 |
US19960749719 |
申请日期 |
1996.11.15 |
| 申请人 |
AGERE SYSTEMS INC. |
发明人 |
BIBLER ADEAN ANNE |
| 分类号 |
B65G49/07;H01L21/673;(IPC1-7):H01L21/00;H01L21/64 |
主分类号 |
B65G49/07 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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