| 摘要 |
FIELD: effective films for field-effect electron emitters used to produce flat displays, electronic microscopes, microwave devices, light sources, and the like. SUBSTANCE: cold-emission cathode whose substrate is covered with carbon film has its carbon film made in the form of irregular structure incorporating carbon micro- and nanoedges and/or micro- and nanofilaments oriented perpendicular to substrate surface, their characteristic scale is 0.05-1 mcm and packing density, 0.1-100 mcm-2; they are covered on top with nanodiamond film whose thickness is a fraction of micrometer. Such cathode is produced in two stages. During first stage carbon film in the form of irregular structure incorporating carbon microedges and/or microfilaments is deposited in DC discharge from mixture of hydrogen and carbon-containing dope at current density of 0.15-0.5 A/sq.cm; deposition is made in mixture of hydrogen with vapors of ethyl alcohol 5-15% or methane 6-30% at full pressure of 50-300 torr and substrate temperature of 700-1100 C, followed by deposition during second stage of diamond film, about 0.1- 0.5 mcm thick or using hot-filament technology, or in same DC discharge, at carbon-containing gas (methane in our case) concentration in hydrogen of 0.5-4% and at surface temperature of 850-1000 C. EFFECT: enhanced electron-emission characteristics, stability in electric fields, enlarged functional capabilities. 7 cl, 3 dwg |
