发明名称 |
Wide frequency band micromachined capacitive microphone/hydrophone and method |
摘要 |
A wide frequency band micromachined microphone including a plurality of micromachined cells of the type including electrodes carried by a membrane supported above a common electrode with conductive lines interconnecting the electrodes is described. A method of operating a microphone array is also described.
|
申请公布号 |
US6493288(B2) |
申请公布日期 |
2002.12.10 |
申请号 |
US20000728713 |
申请日期 |
2000.11.30 |
申请人 |
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY |
发明人 |
KHURI-YAKUB BUTRUS T.;ATALAR ABDULLAH;ERGUN ARIF S.;DEGERTEKIN F. LEVENT |
分类号 |
G01H11/06;G01S3/808;G01S7/00;(IPC1-7):H04R19/00 |
主分类号 |
G01H11/06 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|