METHOD OF SYNTHESIS OF SILANE

摘要

FIELD: inorganic chemistry, chemical technology. SUBSTANCE: invention relates to technology of synthesis of semiconductive silicon and technology of formation of different silicon-containing layers in microelectronics. Silane is synthesized by interaction of quartzite with hydrogen-containing compound at heating. Lithium hydride is used as hydrogen-containing compound. Reaction is performed in atmosphere of inert gas or hydrogen at temperature 600-800 C. After chilling melt is treated with protonic acids aqueous solution. Ratio Li : Si in the parent charge is taken in atomic ratio = 8:1. EFFECT: increased yield of silane, decreased content of impurities, decreased cost. 2 cl, 2 ex