发明名称 Semiconductor integrated circuit device with pad impedance adjustment mechanism
摘要 A semiconductor integrated circuit device, which enables impedance adjustment of a particular pad without affecting other pads or signal wirings or without the need for a design change in basic layout, has formed a number of elements and wirings on and in a silicon substrate 11, and pads 13 stacked thereon via an insulation film 12. A particular pad 13a is connected to a signal wiring 17a formed in a bus line region 17, and a capacitor-forming conductor 14 behaving as an impedance adjusting conductor is formed to surround the pad 13a. A source line conductor 15 is made in a space between the pad 13a and the capacitor-forming conductor 14 to encircle the capacitor-forming conductor 14. Therefore, the pad capacitance can be increased by using the space around the pad 13a, other signal wirings 17b and any others formed in the bus line region 17 are not affected substantially. Since here is used the portion around the pad which is not used normally, the basic layout need not be changed.
申请公布号 US6492707(B1) 申请公布日期 2002.12.10
申请号 US19980217338 申请日期 1998.12.21
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 KAKU MARIKO;YONEYA KAZUHIDE
分类号 H01L21/822;H01L23/485;H01L23/522;H01L27/04;H01L27/10;(IPC1-7):H01L29/00 主分类号 H01L21/822
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