| 摘要 |
In an interference device, an elastic member elastically contacts a portion of an object to be detected. An optical probe is so constructed that light emitted from a light source is split into two light beams one of which is reflected by a reference reflecting surface thereof and the other of which is reflected by a reflecting surface formed on the elastic member, and both reflected light beams are mixed. In a sensor, an interference signal is obtained from the light mixed by the optical probe so as to obtain position information of the object to be detected from the interference signal. The reflecting surface on the elastic member is set to have a width substantially the same as a diameter of the other light beam to be incident on the reflecting surface.
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