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发明名称
Device for heating substrates with side screens and/or secondary reflectors
摘要
申请公布号
AU2002312723(A1)
申请公布日期
2002.12.09
申请号
AU20020312723
申请日期
2002.04.13
申请人
GERSTENDORFER-HART, BARBARA;ACKERMANN, GUNTHER
发明人
BARBARA GERSTENDORFER-HART;GUNTHER ACKERMANN
分类号
B01J19/12;H01L21/00;H05B3/00;(IPC1-7):H01L21/00
主分类号
B01J19/12
代理机构
代理人
主权项
地址
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