,申请号JP19970311714-传众专利搜索

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发明名称
摘要
申请公布号	JP3355118(B2)	申请公布日期	2002.12.09
申请号	JP19970311714	申请日期	1997.11.13
申请人		发明人
分类号	F24F7/06;H01L21/02;(IPC1-7):H01L21/02	主分类号	F24F7/06
代理机构		代理人
主权项
地址

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