| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide, for example, a stage apparatus that has a small amount of turbulence in a magnetic field, and can reduce the size and weight. SOLUTION: In two fixing guides 6 extended in Y direction, Y sliders 7 driven by a linear motor 16 are provided. Two movement guides 21 and 22 extended in the X direction stride across the portion between the Y sliders 7, and an X slider 25, driven by an air cylinder 28, is provided in the movement guide 21. A stage 61 projects on the X slider 25, and a table 65 driven in aθZ direction (about Z axis) is placed on a stage 61.</p> |
