| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method for conveying a substrate which can efficiently remove static electricity charged, without adversely affecting the substrate, and to provide an apparatus and a method for exposing. SOLUTION: The apparatus EX for exposing comprises a substrate holder PH for mounting a photosensitive substrate P, and a soft X-ray emitting unit 11 for emitting soft X-rays XB which are different from an exposure light EL along a mounting surface A of the holder PH for mounting the substrate P.</p> |
