| 摘要 |
PROBLEM TO BE SOLVED: To make a supplied voltage equal in spite of regions on a wafer where a semiconductor integrated circuit apparatus is arranged. SOLUTION: A power source voltage which is applied to a power source supply terminal 21 for burn-in is supplied to an internal power source terminal 28 via a second n type MOSFET 26 and a current detecting resistance 27a. The potential of this internal power source terminal 28 is compared with a reference voltage input into a reference voltage input terminal 22 by a first comparator 23. In the first comparator 23, if the potential of the internal power source terminal 28 is higher than the reference voltage, a Low level voltage is output, and if it is lower, a High level voltage is output, and the output voltage from the first comparator 23 is supplied to a gate electrode of the second n type MOSFET 26 via a first n type MOSFET 25.
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