| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for transferring a substrate which is equipped with a hand portion capable of transferring the substrate holding stably even when the substrate is warped. SOLUTION: A supporting plate 13 of the hand portion 11 of the apparatus for transferring a substrate supports the substrate W being inserted under the substrate W, and a plurality of pads 14 are attached on the supporting plate 13 through coil-springs 15 respectively. When the substrate is warped, the coil- springs 15 are deformed by compression, the pads 14 are inclined according as an inclined surface of the substrate W, thereby, the substrate can be stably held, being kept in a surface-contact state. |
