METHOD FOR FABRICATING FFS MODE LCD

摘要

PURPOSE: A method for fabricating a fringe field switching mode liquid crystal display device is provided to reduce the reject ratio by fabricating the FFS mode LCD through five masking steps. CONSTITUTION: A method for fabricating a fringe field switching mode liquid crystal display device includes the steps of defining TFT areas, pad areas and pixel areas on a transparent insulating substrate(100) and forming counter electrodes on the pixel areas by first masking, forming gate lines(102) and gate pads on the TFT areas and the pad areas by second masking, forming a gate insulating film(103) on the entire surface of the substrate and forming a conductive layer and a metal layer pattern on the gate lines and simultaneously forming a conductive layer and data pads on the gate pads by third masking, forming a first protecting film(107) on the entire surface and forming contact holes for exposing the metal layer pattern, the gate pads and the data pads by fourth masking, depositing a transparent material on the entire surface and forming pixel electrodes(109) by etching the protecting film by fifth masking to expose the metal layer pattern, and forming source/drain electrodes(106b,106c) and back-channels by etching the metal layer pattern and the conductive layer by using the first protecting film as a mask.