| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer lamp, an excimer irradiation device, and an edge-cleaning method, with which organic substances adhered to the edge of an object to be irradiated are dry-cleaned effectively. SOLUTION: A groove, through which the object to be irradiated is inserted, is set at the irradiation window. With the object to be irradiated being inserted through the groove, while the lamp or the object to be irradiated is made to move, the excimer light is irradiated on the object. This realizes irradiation to the edge, without producing light and shade. The presence of the groove forces generated ozone or the like not to scatter and to remain at the edge. Moving of the lamp or the object to be irradiated forms an ozone-rich zone, which can effectively decompose the adhered organic substances.
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