| 摘要 |
PROBLEM TO BE SOLVED: To provide an illuminating optical apparatus which prevents stray beams and which has high illuminance uniformity, and to provide an exposure device having the same. SOLUTION: A light source 40 has a cross-like non-light-emitting unit 40a having an intersection at a center, and four light-emitting units 40b divided via the unit 40a. A transmission optical system 50 guides a luminous flux from the source 40 to a fly-eye lens 60. The lens 60 has an effective aperture of a square shape, and a plurality of element lenses 60a arranged in an array-like state. A lateral direction of the square shape of the aperture coincides with the cross direction of the unit 40a of the source 40. Since the unit 40 such as that described above is provided, the fluxes incident to the lens 60 are all non- parallel to the adjacent surfaces of the lenses 60a. The stray light which passes a gap between the lenses 60a will not be generated. |
