| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an illumination optical apparatus, having higher optical efficiency which can continuously vary the lighting conditions, without using a zoom optical system, an aligner provided with the same illumination optical apparatus and a microdevices utilizing the same aligner. SOLUTION: An optical flux emitted from a light source 1 is incident on a relay optical system 2, made incident on a movable multi-mirror 3, and then made incident to a fly-eye lens 5 via the relay optical system 4 and then uniformly lights a mask 8, after passing condenser optical systems 6, 7. The movable multi-mirror 3 is formed, by including many fine element mirrors 30 arranged as in an array. Each element mirror 30 is movable and individually driven and controlled in the sloping angle and sloping direction. Therefore, the movable multi-mirror 3 divides the light flux into fine units of each reflecting surface and makes the light flux deflect in a predetermined angle in the predetermined direction. Accordingly, the cross-section of the light from the light source can be converted to the desired shape and size.
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