| 摘要 |
PROBLEM TO BE SOLVED: To ensure that fluid is made to flow to the appropriate position of a plate member in the separation of the plate member, such as a bonded substrate. SOLUTION: A measuring unit 150 measures vertical direction position at the outer peripheral part of the bonded substrate 50 over the whole periphery, while the substrate is rotated. Fluid which is jetted from a nozzle 120 separates the bonded substrate 50 into two substrates by the part of a porous layer, while the vertical direction position of the nozzle 120 is dynamically adjusted and the bonded substrate 50 is rotated, based on a measured result. |
