| 摘要 |
PURPOSE: A conveyor is provided to prevent slip between both sides of a substrate and a conveyor roller with a pressure roller, and to dry securely by restricting remaining processing fluid around the center of the substrate. CONSTITUTION: When conveying a substrate(G) by a conveyer, the substrate on a conveying roller(43) is conveyed while pressing both terminals with a pressure roller(36). Further, a supporting roller(37) having a diameter larger than the diameter of a placing part(43a) of the conveying roller is provided, and the substrate is conveyed while being projected upward so that the substrate is prevented from being warped. |
