发明名称 WORK CARRIER AND DICING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a work carrier capable of surely drying a diced work, simplifying device constitution and shortening the carrying time of the work. SOLUTION: The work carrier is provided with a cleaning and drying part 15 for cleaning and drying the other surface of the work, while the diced work is held and carried altogether by a work carrying part X2. Respective operations in which the work is wet cleaned by a cleaning roller 20 accompanying the carrying operation of the work carrying part X2 and wiped and dried by a drying roller 21 and then moisture and cut waste are removed by an air blower part 22 are successively performed.
申请公布号 JP2002353169(A) 申请公布日期 2002.12.06
申请号 JP20010156795 申请日期 2001.05.25
申请人 APIC YAMADA CORP 发明人 ANDO MAKOTO;ANDO SHUJI;YANAGISAWA TAKAYUKI
分类号 B08B3/02;F26B3/04;F26B5/16;F26B25/20;H01L21/301;H01L21/304;H01L21/677;H01L21/68;(IPC1-7):H01L21/301 主分类号 B08B3/02
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