发明名称 |
WORK CARRIER AND DICING DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a work carrier capable of surely drying a diced work, simplifying device constitution and shortening the carrying time of the work. SOLUTION: The work carrier is provided with a cleaning and drying part 15 for cleaning and drying the other surface of the work, while the diced work is held and carried altogether by a work carrying part X2. Respective operations in which the work is wet cleaned by a cleaning roller 20 accompanying the carrying operation of the work carrying part X2 and wiped and dried by a drying roller 21 and then moisture and cut waste are removed by an air blower part 22 are successively performed. |
申请公布号 |
JP2002353169(A) |
申请公布日期 |
2002.12.06 |
申请号 |
JP20010156795 |
申请日期 |
2001.05.25 |
申请人 |
APIC YAMADA CORP |
发明人 |
ANDO MAKOTO;ANDO SHUJI;YANAGISAWA TAKAYUKI |
分类号 |
B08B3/02;F26B3/04;F26B5/16;F26B25/20;H01L21/301;H01L21/304;H01L21/677;H01L21/68;(IPC1-7):H01L21/301 |
主分类号 |
B08B3/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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