发明名称 PRODUCTION METHOD FOR SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To align the variable capacitance of two adjacent varactor diodes (2) and (3) inside the same semiconductor chip (1), by a temperature difference inside a wafer (4) in heat treatment. SOLUTION: The short sides of two varactor diodes (2) and (3) inside the same semiconductor chip (1) are connected mutually continuously. Thus, by applying heat treatment to the semiconductor chip (1), while keeping the laterally long form thereof, the variable capacitance of two varactor diodes can be made almost equal.
申请公布号 JP2002353469(A) 申请公布日期 2002.12.06
申请号 JP20010160138 申请日期 2001.05.29
申请人 SANYO ELECTRIC CO LTD 发明人 HATAMOTO MITSUO
分类号 H01L21/22;H01L29/93;(IPC1-7):H01L29/93 主分类号 H01L21/22
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