PROCESS CONTROL SYSTEM AND METHOD

摘要

PROBLEM TO BE SOLVED: To automatically manage the progress condition of a process for every wafer in a manufacturing process of the wafer. SOLUTION: A management terminal 4 prepares an information table 3 in which status data being a value showing the progress condition of a process is recorded in a rewritable way in a lot unit in each wafer in a database 2 connected to a network. The management terminal 4 receives an output such as measurement results from a measuring instrument 5, changes the status data in a wafer unit in accordance with the progress condition of the process and updates the information table 3.