| 摘要 |
PURPOSE: To provide a method and system for transferring a cassette which can effectively utilize an installation area of a clean room 100 constructed in a plant by controlling equipment costs and a running cost of the clean room 100, suppressing an increase of weight and size of a transfer vehicle even though a substrate 41 becomes large-sized and its weight increases, withholding the cost at the transfer vehicle, and making the width of a passage narrow. CONSTITUTION: The method and system for transferring the cassette consist of a process of loading the sealed cassette 60 on the down-loading type transfer vehicle 50, a process of moving the down-loading type carrier truck 50 into a truck-storing type cassette stage 70 and loading the sealed cassette 60 on a vehicle-storing type cassette stage 70, a process of closely locating the sealed cassette 60 in a sealing type robot storing clean room 80, and a process in which a substrate carry in/out robot 110 transfers the substrate between the sealed cassette 60 and a substrate treatment apparatus 102.
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