| 发明名称 |
APPLICATION DES PLASMAS DENSES CREES A PRESSION ATMOSPHERIQUE AU TRAITEMENT D'EFFLUENTS GAZEUX |
| 摘要 |
The invention concerns a system for treating gases such as PFC or HFC with plasma, comprising: (6) pumping means (6) whereof the outlet is at a pressure substantially equal to atmospheric pressure, means (8), at the pump output, to produce a plasma at atmospheric pressure.
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| 申请公布号 |
FR2825295(A1) |
申请公布日期 |
2002.12.06 |
| 申请号 |
FR20010007150 |
申请日期 |
2001.05.31 |
| 申请人 |
L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE |
发明人 |
ROSTAING JEAN CHRISTOPHE;GUERIN DANIEL;LARQUET CHRISTIAN;LY CHUN HAO;MOISAN MICHEL;DULPHY HERVE |
| 分类号 |
H05H1/30;B01D53/32;B01D53/68;B01D53/70;B01J19/08;C23C16/44;H01L21/205;H01L21/3065;(IPC1-7):B01J19/12;H05H1/24;H01L21/30 |
主分类号 |
H05H1/30 |
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