发明名称 ASSEMBLY TYPE WAFER BOAT
摘要 <p>PROBLEM TO BE SOLVED: To avoid dispersing or reducing the power of pressing a supporting rod at the connection part of the supporting rod and a supporting plate onto the supporting plate, and to avoid unfastening the connection of the supporting rod and the supporting plate by surely holding it. SOLUTION: A passing line (14), which passes the core of revolution (9) of a stopper (8) and the contact point (12) of the stopper (8) and the supporting rod (4), is made to be at right angles to the supporting rod (4) and the engagement face (10) of the engagement hole (6a) in the direction of axis (9) of revolution.</p>
申请公布号 JP2002353295(A) 申请公布日期 2002.12.06
申请号 JP20010161896 申请日期 2001.05.30
申请人 TECNISCO LTD 发明人 TAKEYASU JUNJI
分类号 H01L21/683;H01L21/22;H01L21/31;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/683
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