| 摘要 |
PROBLEM TO BE SOLVED: To use a contact temperature sensor for surely measuring and controlling the temperature of a heating plate. SOLUTION: Recesses D1, D2, and D3 are provided on the lower surface of a piece 65a of a heat plate 63, and detector sections B1, B2, and B3 of three thermocouples A1, A2, and A3 are provided in the recesses D1 to D3. Each of metal wires D1 to D3 from the detector sections B1 to B3 is connected to an operating section 71. A program is loaded in the operation section 71, which selects the highest temperature detected by the detector sections B1 to B3, and assumes, it as the measured temperature of the piece 65a. The measured temperature selected by the operation section 71 is outputted to a control section 68. The control section 68 operates a heater 66a via a power supply 67a, based on the measured temperature, and can control the temperature of the piece 65a, so that it becomes the set temperature.
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