| 摘要 |
<p>A high sensitivity pressure sensor with long term stability including a housing with first and second chambers, a membrane (20) separating the first and second chambers, a first electrode located in the first chamber (16) and spaced from one side of the membrane forming a first capacitor therewith, and a second electrode located in the second chamber (18) and spaced from an opposite side of the membrane forming a second capacitor therewith.</p> |
