发明名称 |
Charged particle beam alignment method and charged particle beam apparatus |
摘要 |
An object of the present invention is to provide a charged particle beam apparatus and an alignment method of the charged particle beam apparatus, which make it possible to align an optical axis of a charged particle beam easily even when a state of the charged particle beam changes. The present invention comprises calculation means for calculating a deflection amount of an alignment deflector which performs an axis alignment for an objective lens, a plurality of calculation methods for calculating the deflection amount is memorized in the calculation means, and a selection means for selecting at least one of the calculation methods is provided.
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申请公布号 |
US2002179851(A1) |
申请公布日期 |
2002.12.05 |
申请号 |
US20020082288 |
申请日期 |
2002.02.26 |
申请人 |
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发明人 |
SATO MITSUGU;OTAKA TADASHI;EZUMI MAKOTO;TAKANE ATSUSHI;YOSHIDA SHOJI;YAMAGUCHI SATORU;OZAWA YASUHIKO |
分类号 |
H01J37/147;H01J37/28;(IPC1-7):H01J37/04 |
主分类号 |
H01J37/147 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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