发明名称 |
Mechanically assisted restoring force support for micromachined membranes |
摘要 |
The present invention includes an integrated circuit switch including a membrane supported over a first conductor on a substrate, a conductive region on the membrane and connecting to the first conductor on the substrate, a pulldown electrode on the substrate and under the membrane and a pillar to support the membrane after the pulldown threshold has been reached. A voltage greater than a pulldown threshold is applied between the membrane and the pulldown electrode will pull the membrane down to make a capacitive coupling to the first conductor. The addition of the pillars increases the upward restoring force when the activation voltage is removed.
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申请公布号 |
US2002179421(A1) |
申请公布日期 |
2002.12.05 |
申请号 |
US20010843395 |
申请日期 |
2001.04.26 |
申请人 |
WILLIAMS BYRON L.;NG LAURINDA W.;CRENSHAW DARIUS L.;MELENDEZ JOSE L. |
发明人 |
WILLIAMS BYRON L.;NG LAURINDA W.;CRENSHAW DARIUS L.;MELENDEZ JOSE L. |
分类号 |
H01H59/00;(IPC1-7):H01H57/00 |
主分类号 |
H01H59/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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