Producing a metal plate having an opening with an ultra-small cross-section used for a screen of an electron microscope comprises forming a recess in a region of the plate by etching the rear side of the plate

摘要

Production of a metal plate having an opening with an ultra-small cross-section comprises forming a recess in a region of the plate by etching the rear side of the plate. An Independent claim is also included for a device for producing the metal plate. Preferred Features: The plate is illuminated during etching on the side of the plate in which the recess is to be formed and the etching is adjusted by making the light appear from the rear side.