| 发明名称 |
Catadioptric objective |
| 摘要 |
A catadioptric objective comprises a plurality of lenses and at least two deflecting mirrors that have reflecting surfaces that are at a specific angle, in particular of 90°, to one another. The two deflecting mirrors are arranged with their reflecting surfaces on a common base member whose position in the objective can be set.
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| 申请公布号 |
US2002181125(A1) |
申请公布日期 |
2002.12.05 |
| 申请号 |
US20020118479 |
申请日期 |
2002.04.08 |
| 申请人 |
HOLDERER HUBERT;WEBER ULRICH;KOHL ALEXANDER;GRUNER TORALF;ZACZEK CHRISTOF;ULLMANN JENS;WEISER MARTIN;GELLRICH BERNHARD;MUENKER HASRTMUT |
发明人 |
HOLDERER HUBERT;WEBER ULRICH;KOHL ALEXANDER;GRUNER TORALF;ZACZEK CHRISTOF;ULLMANN JENS;WEISER MARTIN;GELLRICH BERNHARD;MUENKER HASRTMUT |
| 分类号 |
G02B17/08;G03F7/20;H01L21/027;(IPC1-7):G02B17/00 |
主分类号 |
G02B17/08 |
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