发明名称 |
Determining image distortions of optical illuminated devices comprises applying photo-active layer on substrate, and forming latent image in photo-active layer |
摘要 |
Determining image distortions of optical illuminated devices comprises applying a photo-active layer on a substrate; forming a latent image of the mask in the photo-active layer by irradiating; treating with amplifying agent which reacts with components of the material of the photo-active layer to form a chemical bond; and determining the growth of the photo-active layer outside and/or inside the image of the mask Independent claims are also included for the following: (i) a process for optimizing optical illuminated devices; and (ii) a process for determining the local radiation dose. Preferred Features: After producing the latent image, a contrasting step is carried out, preferably by heat treating. An anti-reflection layer is formed on the substrate below the photo-active layer.
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申请公布号 |
DE10121179(A1) |
申请公布日期 |
2002.12.05 |
申请号 |
DE20011021179 |
申请日期 |
2001.04.30 |
申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
CZECH, GUENTHER;RICHTER, ERNST-CHRISTIAN;SCHELER, ULRICH;SEBALD, MICHAEL |
分类号 |
G03F1/00;G03F7/20;G03F7/26;G03F7/38;(IPC1-7):G03F7/00 |
主分类号 |
G03F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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