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发明名称
Standard für ein Nanotopographie-Gerät und Verfahren zur Herstellung des Standards
摘要
申请公布号
DE10044162(C2)
申请公布日期
2002.12.05
申请号
DE2000144162
申请日期
2000.09.07
申请人
WACKER SILTRONIC GESELLSCHAFT FUER HALBLEITERMATERIALIEN AG
发明人
PASSEK, FRIEDRICH;SCHAUER, REINHARD;SCHMOLKE, RUEDIGER;KUMPE, RALF
分类号
G01Q40/02
主分类号
G01Q40/02
代理机构
代理人
主权项
地址
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