An electrode structure comprising a substrate and an electrode provided on the substrate,characterized in that the substrate includes a fluorine−containing polyimide layer,and a fluorine−free resin layer is interposed between the fluorine−containing polyimide layer and the electrode;especially,an electrode structure comprising a substrate having gold on the surface thereof and aluminum interposed between the substrate and the gold.The electrode structure is free from electrode separation due to a poor electrode adhesion and has a strength sufficient enough to prevent the interface between the substrate and the electrode formed thereon from being damaged by a ultrasonic power.
申请公布号
WO02097522(A1)
申请公布日期
2002.12.05
申请号
WO2002JP05194
申请日期
2002.05.29
申请人
HITACHI CHEMICAL CO.,LTD.;YAMAGUCHI, MASATOSHI;MIYADERA, NOBUO;YAMANOI, KIYOSHI;MATSUURA, HIROYUKI