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发明名称
SPUTTER-TARGET MIT ULTRAFEINEN ORIENTIERTEN KÖRNERN UND VERFAHREN ZU DEREN HERSTELLUNG
摘要
申请公布号
DE69526649(T2)
申请公布日期
2002.12.05
申请号
DE19956026649T
申请日期
1995.12.22
申请人
JOHNSON MATTHEY ELECTRONICS INC., SPOKANE
发明人
DUNLOP, ALDEN;YUAN, JUN;KARDOKUS, KIYABU;EMIGH, ALAN
分类号
C22F1/04;B21C23/01;B22F3/115;B22F3/20;B22F3/24;C22C1/04;C22C21/00;C23C14/34;(IPC1-7):B22F3/00;B22F7/04
主分类号
C22F1/04
代理机构
代理人
主权项
地址
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