| 摘要 |
The invention provides a highly reliable acceleration sensor capable of being manufactured at a low cost easily, and a manufacturing method the acceleration sensor. The acceleration sensor comprises: a fixed electrode (50, a movable electrode (40), and a mass member (30) joined to the movable electrode (40) and displaceable. The mass member (30) is mainly constructed of a thin polyimide membrane (2). Therefore the acceleration sensor can be manufactured in a shorter period of time and more easily as compared with a conventional construction utilizing a polysilicon membrane, and a shorter manufacturing time and lower cost is achieved.
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