Substrate processing apparatus and a method for fabricating a semiconductor device by using same

摘要

A substrate processing apparatus includes a process tube, which processes a plurality of wafers held in a boat and a load lock chamber accommodating therein the boat before and after the boat is loaded into and unloaded from the process tube. The load lock chamber is raised and lowered along with the process tube disposed thereon by a boat elevator and a moving stroke of the load lock chamber is set to be greater than a length of the process tube.