发明名称 Gas containment system
摘要 A gas containment system comprising a source of high pressure gas and means to regulate the supply of the gas to processing apparatus, wherein in the event of failure of the regulatory means, means are provided to direct gas escaping from the regulatory means in to a chamber at sub-atmospheric pressure.
申请公布号 US2002179156(A1) 申请公布日期 2002.12.05
申请号 US20020139688 申请日期 2002.05.03
申请人 SMITH JAMES ROBERT 发明人 SMITH JAMES ROBERT
分类号 B01J4/00;F17C7/04;F17C13/12;H01L21/02;(IPC1-7):F04F3/00 主分类号 B01J4/00
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