Anlage zur Bearbeitung von Wafern,申请号DE1999121243-传众专利搜索

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发明名称	Anlage zur Bearbeitung von Wafern
摘要
申请公布号	DE19921243(C2)	申请公布日期	2002.12.05
申请号	DE1999121243	申请日期	1999.05.07
申请人	INFINEON TECHNOLOGIES AG	发明人	GOETZKE, MICHAEL
分类号	H01L21/677;B65G49/07;H01L21/00;H01L21/673;(IPC1-7):B65G49/07	主分类号	H01L21/677
代理机构		代理人
主权项
地址

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