| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive object lens with high NA which can be easily manufactured. SOLUTION: The optical element (Fig. 2 (g)) having lenses formed on both surfaces of a transparent substrate is manufactured in the process (Fig. 2 (b)) of forming a lens form by irradiating a photoresist applied on a transparent substrate with predetermined beams of light (Fig. 2 (a)), a process of transferring the lens form to the transparent substrate by dry etching (Fig. 2 (c)), and repeating the above processes on both surfaces of the upper and lower faces of the transparent substrate (Fig. 2 (d) to Fig. 2 (f)). |
