| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a pressure detector capable of always accurately detecting an external pressure in a high/low temperature environment. SOLUTION: This package for the presser detector is provided with an insulated base body 1 for mounting a semiconductor element 3 on one main face, a plurality of wiring conductors 5 arranged in the insulated base body 1 for electrically connecting electrodes of the semiconductor element 3, an insulating board 2 connected to the insulated base body 1 flexibly for forming a sealed space S between the other main face of the insulated base body 1 and itself, capacitance formation first electrode 7 installed to the other main face of the insulated base body 1 inside the sealed space S and electrically connected to one wiring conductor 5a in the wiring conductors 5, and a capacitance formation second electrode 9 installed to the inside main face of the insulating board 2 opposedly to the first electrode 7 and electrically connected to the other wiring conductor 5b of the wiring conductors 5. A pressure inside the sealed space S is set to be 1 Pa or less at 20 deg.C.</p> |
