| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning device that can reconcile lightness and high precision positioning by ensuring precise positioning irrespective of deformation of a casing. SOLUTION: The positioning device 10, in which a process chamber P in communication with the outside via an opening 20a cut in the casing 20 is sealed off by a differential evacuation seal 60, has a first table 41 disposed in the process chamber P, a first moving part 40 connected to the first table 41 via the opening 20a to move the first table 41 from outside the casing 20, and an intermediate member 30 disposed between the casing 20 and the first moving part 40. The differential evacuation seal 60 forms a seal between the intermediate member 30 and the first moving part 40, and an O-ring 21 for absorbing deformation of the casing 20 forms a seal between the intermediate member 30 and the casing 20. Even if the casing 20 deforms, the O-ring 21 can absorb the deformation while maintaining the sealing state, so that the use as a reference plane of a surface of, for example, a surface plate A outside the casing 20 can ensure precise positioning. |
