摘要 |
PROBLEM TO BE SOLVED: To provide a GMR element suited for car-carried sensor elements which has a high disturbance magnetic field resistance, a high sensitivity, i.e., a high S/N ratio of output signal, a high heat resistance and a high reliability enough to keep a high S/N ratio even in the stock and the operation under a high temperature environment. SOLUTION: The sensor element has alternately laminated magnetic layers 2a containing Ni, Fe and Co as main components and nonmagnetic layers 2b containing Cu as a main component. The atomic composition ratios of the layers meet a magnetic layer composition Ni(1-x-y) Fey Cox (x>=0.7, y<=0.3, (1-x-y)<=0.15) and a nonmagnetic layer composition Cuz A)(1-z) (A is other additive element than Cu, z>=0.9), the magnetic layer thickness tm is 10Å<tm<25Å, the nonmagnetic layer thickness tn is 18Å<tn<25Å, and if the guaranteed stock temperature of the sensor element is T deg.C, the sensor element is previously heat treated at temperatures over T deg.C.
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